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200mm Clean Oven – Espec ‘PVHC-331MS ‘ (2001). Temperature: 60-300°C.
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200mm CMP – STRAUSBAUGH/DNS ‘Model-6DS-SP/AS-2000’
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200mm CMP – STRAUSBAUGH/DNS ‘Model-6DS-SP/SP-W813-AS’
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200mm CVD – AMAT ‘P5000 Mark II ‘
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200mm CVD – AMAT ‘P5000 Mark II ‘
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200mm Dry Etching for oxide or Nitride – PLASMA-THERM.INC ‘790 Series’
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200mm Furnace – TEL ‘ -8SECFTPS ‘
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200mm In-Line Developer – YUASA ‘SR-8040A’
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200mm In-Line Developer – YUASA ‘SR-8040A’
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200mm In-Line Developer – YUASA ‘SR-8040A’
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200mm Inspection SEM – KLA-TENCOR ‘eS20XP’
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200mm Inspection SEM – SEIKO ‘Sxi200P K-A113000022’
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200mm Inspection SEM – SEIKO ‘Sxi200P K-A113000022’
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200mm Medium Current IMP – NISSIN ‘Exceed2000’
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200mm Metal Etcher – HITACHI ‘M-308’
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