SVG 8800 Photoresist Coat & Develop Track

SVG 8800 Photoresist Coat & Develop Track

Wafer Size: 150mm

Vintage: 2020

System is on-line and confirmed capable of producing wafers as-is. CE Mark certified, with all cables present, no field modifications, no visible corrosion on modules, and no missing or damaged parts. Includes manuals; shipping brackets not applicable. Wafer handler is present with robot-type handler and pre-aligner; no mini-environment. Software version 14.4-48, with GEM/SECS, serial, and Ethernet connectivity. Facility requirements: CDA, vacuum, N₂ gas, and 208V power; DIW not required (chill water instead).

Available November 2026