SEZ Lam SP203BH8R/BH6 Spin Etcher with 3 Chemistry cabinets

SEZ Lam SP203BH8R/BH6 Spin Etcher with 3 Chemistry cabinets

Wafer Size: 150mm

Vintage: 1999

The system is equipped with 6-Inch Bernoulli handling with Pinless Chuck (with centering pins); Exhaust up,

Heat exchangers: 2x double Hex with Lauda (Medium 1 and Medium 3), 1x single Hex with Lauda (Medium 2); modification to allow the chemical cabinets to be located above the system with intermediate tank; FFU: A fan or fan-controller is not working; The Hardware of a Measuring system is installed, but no Software;

Main Unit Software: Major Version 117 / Minor Version 2015.08.21 / GEM Version GEM5.8

Chemistry: 3 cabinets with SEZ DOS Software; The PC is repaired

Chemistry cabinet 1: with Buffertank and Maintank

Chemistry cabinet 2: with Buffertank and Maintank, but we never use the Buffertank, the Drain of the cabinet 2 is repaired

Chemistry cabinet 3: with Buffertank and Maintank, but without Bufferpump and we never use the Chemistry cabinet 3 for the process

Available September 2026