Key Item Details

Condition:

Good

Operational Service:

Good

Product ID:

CSISEM051120261416

Wafer Sizes:

150mm

Vintage:

2004

Description

Semitool SST-C-421-280 Spray Solvent Wet Process System

Wafer Size: 150mm

Vintage: 2004

All cables present; no missing or damaged parts. Note: visible corrosion on modules, no shipping brackets, and field modifications have been made. No wafer handler, power supply, AC distribution box, external transformer, UPS, or backing pump(s) included; heat exchanger/chiller is present. Facility requirements: CDA at 65–70 PSI, DIW at 35 PSI minimum, vacuum, N₂/CO₂ gas, and 208V AC power.

Available November 2026