Lam Research Rainbow 4720 Single-Wafer Plasma Etcher

Lam Research Rainbow 4720 Single-Wafer Plasma Etcher

Wafer Size: 200mm

Vintage: 1997

Missing HDD

Lam Envision software on a Rainbow mainframe etcher, PM 1 / main chamber configured as a 4720 Tungsten Etch/Metal Etch chamber. System is off-line and cannot produce wafers as-is; no OEM audit and no decontamination report. SECS interface present, all cables present, no known field modifications. Features electrostatic chuck, signal lamp tower, built-in SMIF, endpoint detection, autoloader, built-in HEPA filter, orbitally welded gas box, backside helium cooling, heated pumping manifolds, on-board RF generators, remote RF cart, remote gas box, remote operator interface, remote AC box, and atmospheric passivation module. Includes high-conductance manifold; no isotropic etch module or plasma load lock. Standard manuals included; clean room manuals not included.

Not included with system: loadlock pump, main etch chamber pump, strip/ash chamber pump, roughing pump #3, and chiller. No turbo pump on process chamber(s).

Available November 2026