Lam Research Rainbow 4520i Oxide Etcher/Ascher

Lam Research Rainbow 4520i Oxide Etcher/Ascher 

Wafer Size: 200mm

Lam Envision etcher running Envision 1.5.2 Released software. Main chamber is ESC oxide etch with a ceramic electrostatic chuck. Isotropic chamber configured for isotropic etch, with one heated paddle. Includes orbital weld gas box, with seven Unit UFC 1200A and two Horiba Z500 MFCs, plus two Lam Harmonic arm drives. Dry pumps: one Busch DS80 Cobra, one BOC Edwards iQDP80 with Leybold WSU501 blower, and one Busch BA100. Chillers: M&W Dual Ch TCU model RPC2/28W-RNB. Also includes remote AC box and RF cart.

Available November 2026