Key Item Details

Condition:

Good

Operational Service:

Good

Product ID:

CSISEM091120261424

Wafer Sizes:

200mm

Vintage:

N/A

Description

Lam Research Rainbow 4520i Oxide Etcher/Ascher 

Wafer Size: 200mm

Lam Envision etcher running Envision 1.5.2 Released software. Main chamber is ESC oxide etch with a ceramic electrostatic chuck. Isotropic chamber configured for isotropic etch, with one heated paddle. Includes orbital weld gas box, with eight Unit 1661 Multiflow and one Horiba Z500 MFCs, plus two Lam Harmonic arm drives. Dry pumps: one Busch DS80 Cobra, one Busch DS500 Cobra, and one Busch BA100. Chillers: M&W Dual Ch TCU model RPC2/28W-RNB. Also includes remote AC box and RF cart.

Available November 2026