DNS / SCREEN SS-80EX Spin Scrubber

DNS / SCREEN SS-80EX Spin Scrubber

Wafer Size: 150mm

Vintage: 2018

Condition & Configuration — Note: unit requires a robot (currently off but connected). Decontamination report exists; no field modifications and no visible corrosion on modules. All cables present, though some parts are missing/damaged and shipping brackets are not included. Handler, robot, and end-effector are all standard configuration with 4 cassette/FOUP loaders; no pre-aligner or mini-environment. System software and application both run Std GEM, with SEMI standard options, GEM/SECS, and HSMS communication. Facility requirements: CDA, DIW, N₂ gas, and power.

Additional Notes — Monitor is non-functional. Units 3, 4, 7, and 8 are disassembled.

Available November 2026