Key Item Details

Condition:

Good

Operational Service:

Good

Product ID:

CSISEM051120261457

Wafer Sizes:

200mm

Vintage:

2005

Description

DNS / SCREEN SS-80BW-AR Wafer & Mask Scrubber

Wafer Size: 200mm

Vintage: 2005

Front/Backside Wafer Scrubber — Software version SYS 394F. Configured with 2 reverser, 3 backside, and 3 frontside soft spray and scrub stations. Uses CO₂-sparged DIW. Chuck type/material: stainless steel, Teflon, and nylon. Fitted with 5 Horiba SEC-4600 MFCs and a DNS robot.

Available November 2026