Axcelis RapidStrip 210ES Photoresist Stripper/Asher

Axcelis RapidStrip 210ES Photoresist Stripper/Asher

Wafer Size: 150mm

Vintage: 2004

Tool install type is TTW / stand-alone. System is on-line and confirmed capable of producing wafers as-is. CE Mark certified, manuals included. No field modifications, no visible corrosion on modules, no missing or damaged parts, and all cables present. Wafer handler included (robot type) with 2 cassette/FOUP loaders and a pre-aligner. System software version 1.6.6.3, with GEM/SECS, serial, and Ethernet connectivity. Facility requirements: CDA, HPN₂/N₂/O₂/CF₄ gas, and 208 VAC power; DIW and vacuum not required.

Available November 2026