AST Elektronik / Mattson SHS 2800 RTP/RTA System

AST Elektronik / Mattson SHS 2800 RTP/RTA System

Wafer Size: 150mm

HDD Not Included

Software version SHSp1.4.2, running on Windows 2000, with SECS/GEM interface. Tungsten-halogen lamp. Wafer handling uses a PRI single-arm robot (model ATM305-1-S, S/N 0406-10409) with SUS body and quartz wafer holder. No indexer, but a pre-aligner/centering station and single-wafer preheat dummy station are present. Temperature is monitored and controlled via a fast-response optical pyrometer system. Utilities include an oxygen sensor in the vent line and a UPS power supply. No BPSG liner option and no ex-situ reflectometer.

Four MFC-controlled gas lines, all Horiba STEC: N₂ at 30 SLM, O₂ at 1 SLM, NH₃ at 10 SLM, and L-N₂ at 20 SLM.

Available November 2026