CMP tool with 4 polishing heads featuring 5-zone control and a 5-zone UPA. No RTPC device; IAPC included. Load cup is standard type (not HCLP).
Damage/missing parts: FI cannot initialize due to a damaged computer I/O port. Front side and back side computers show no display due to a damaged switch. Cleaner running beam cannot initialize. Missing front side computer keyboard and mouse, and missing FI plunger box cover. Inspection recommended to reconfirm condition.
Note: dry pumps and customer-provided items are not included in the sale.