AMAT P5000 XT Poly/Trench Etcher

AMAT P5000 XT Poly/Trench Etcher

Wafer Size: 200mm

Vintage: 1999

Pictures are from parallel tool.

-Top mount electronics and He backing -2 Chamber Narrow Gap tool

-Installed pos. Chamber A/B -Standard Phase 3 Robot

-15 slot storage elevator -ZA Slit Valves pos. A/B

-Wafer Positioning Sensor (WPS) -Cassette loadport with 2 stages

-2 Monitor -System SSD

-CF card Floppy emulator -MXP Unibody chamber with Narrow Gap lid

-Turbo Seiki STP-301CVB -Controller Seiki SCU-350D

-MKS Manometer -7 Gas Sticks / Brooks GF 100 MFCs

-Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4 -2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft)

-2x ENI OEM 12B RF generators -AC Box at RF Rack

Available October 2026