AMAT P5000 Mark II DLH PECVD Silane

Key Item Details

Condition:

Good

Operational Service:

Good

Product ID:

CSISEM101120261651

Wafer Sizes:

150mm

Vintage:

2010

Description

AMAT P-5000 Mark II DLH PECVD Silane

Wafer Size: 150mm

Vintage: 2010

System was initially configured for 100 mm and converted to 150 mm in 2012. Tool was refurbished and purchased from OEM Group, Inc. Center finder board was retrofitted for transparent and opaque substrates

Available November 2026