Key Item Details

Condition:

Good

Operational Service:

Missing HDD

Product ID:

CSISEM051120261239

Wafer Sizes:

300mm

Vintage:

2002

Description

ADE / KLA AFS-3220 Wafer Geometry Measurement System

Wafer Size: 300mm

Vintage: 2002

Handler, robot, and end-effector are all Brooks, with pre-aligner and mini-environment included. System software runs on Windows NT. Supporting equipment includes power supply and AC distribution box. Facility requirements: CDA at 40 PSI, vacuum at −90, and 20A / 250V power.

Missing HDD/Parts

Available November 2026