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Satcon PVS-75 75kW/75kVA Power Supply Cabinet, 600VDC input, output: 3ph
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Atcor Corp. Mdl ULTRA-1210 Box washer, DOM Dec 2000, 208V/3Ph,
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Eagle Test System Rack Cabinet with Hypervision V7 control module, ETS-500D power supply.
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Accent Mdl CDS-200 Scatterometry system with control box,
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Cascade PS21 Parametric Autoprober System, 200mm, with dual illumination sources, single LCD monitor
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Accent Mdl CDS-200 Scatterometry system with control box,
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Cascade PS21 Parametric Autoprober System, 200mm,
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Accent Mdl CDS-200 Scatterometry system with control box,
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Accent Mdl CDS-200 Scatterometry system with control box,
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Accent Mdl CDS-200 Scatterometry system with control box
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Accent Mdl CDS-200 Scatterometry system with control box,
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Hirayama ‘PC 364 RII’ High Pressure, humidity, biased chamber
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IVS ‘ACV-4 8000’ Accuvision Optical Critical Dimension measurement photolithography tool 150mm
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IVS ‘ACV-4 8000’ Accuvision Optical Critical Dimension measurement photolithography tool 150mm
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Fusion ‘Microlite 150’ Ultra Violet Cure System
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JEOL ‘JOL7505 01 TE’ Scanning Electron Microscope System 150mm,
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Oven – ESPEC ‘VOS40’
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JEOL ‘7505’ Scanning Electron Microscope System 200mm,
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Oven – ESPEC ‘VAC-300’
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Rudolph ‘FE-IV’ Metrology System Note currently crated in Storage.
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200mm Wafer transfer System – FAITH INTERNATIONAL ‘Rapitran II’
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Poly-Flow Engineering Inc. Mdl S-610 Vertical furnace quartz ware cleaner,
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Local Supply Unit – Yatai Semiconductor ‘SSU-120B’
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Local Supply Unit – Yatai Semiconductor ‘SSU-120B’
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Local Supply Unit – Yatai Semiconductor ‘SSU-120B’
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200mm Dry Etching for oxide or Nitride – PLASMA-THERM.INC ‘790 Series’
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200mm Optistation-AEI – NIDEK ‘IM-15’
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200mm PVD Sputter – Canon-ANELVA ‘I-1060SV2+1’
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200mm PVD Sputter – Canon-ANELVA ‘I-1060SV2+1’
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200mm VF Anneal(Mid. Temperature) – KE ‘Vertex-III(F)’
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Oven – ESPEC ‘VOS40’
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200mm VF Anneal(Mid. Temperature) – SVG ‘SVG AVP8000’
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200mm Inspection SEM – SEIKO ‘Sxi200P K-A113000022’
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200mm CMP – STRAUSBAUGH/DNS ‘Model-6DS-SP/AS-2000’
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200mm Inspection SEM – SEIKO ‘Sxi200P K-A113000022’
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200mm CMP – STRAUSBAUGH/DNS ‘Model-6DS-SP/SP-W813-AS’
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200mm Overlay – NANO ‘Q200I’
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200mm Thickness Measurement – THERMAWAVE ‘OP-2600’
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Oven – SATO VAC ‘DY-1020P’
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200mm PR strip – Kaijo ‘RT-1030T-C’
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200mm Overlay – TKK ‘MAC-110MV1’
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200mm Overlay – TKK ‘MAC-92MV1’
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200mm Overlay – TKK ‘MAC-92MV1’
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200mm Overlay – TKK ‘MAC-92MV1’
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200mm Overlay – TKK ‘MAC-92MV1’
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