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TEL P-8XL 200mm
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KLA TENCOR P-2 PROFILER 1996
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Tokyo Electron Ltd. TELFORMULA ALD High-K Vertical LPCVD Furnace
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TEL TE 5000SATC 150mm
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HITACHI S-9360 12″
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Negevtech Bright Field Inspection
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SHINKAWA UTC-3000WE 200mm
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DAGE PRECISION TOOL 4000HS
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Tokyo Electron Ltd. Trias Ti/TiN Metal CVD (Chemical Vapor Deposition)
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TEL MB2 730 150mm
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LEICA INS3000DUAL 8″
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Newport 8’x4′ Optical Table Breadboard
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SHINKAWA UTC-2000 SUPER 200mm
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ULVAC PHOENIX
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Tokyo Electron Ltd. Expedius+ Batch Wafer Processing
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