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    BTU Bruce BDF-4 Oxidation Furnace -2

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    DIFFUSION & OXIDATION

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    VCR Group IBS/TM200S Ion Beam Sputterer

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    Riber 2300 MBE

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    Denton DV-502C (CRYO) Thermal Evaporator

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    EVAPORATION & SPUTTERING (PVD)

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    Thermco 4504 Four-Stack LPCVD Reactor

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    TEL Alpha 8S LPCVD PolySi/SiN/ HTO Reactor

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    SemiTherm VTP 1500 LH LPCVD Reactor (SiN)

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    Kokusai DJ815V-8L LPCVD Silicon Nitride Reactor

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    CHEMICAL VAPOR DEPOSITION (CVD)

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    EG 4090 prober x

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    Laser M/K Handler SAMIL SLM 27T

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    Auto Handler MIRAE M430H

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    Auto Handler MIRAE M430

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