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    Therma-Wave Optiprobe 2690 DUV

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    Tencor SurfScan 6200

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    Tencor P-1 Long Scan Profiler

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    Rudolph AutoEL Ellipsometer

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    Prometrix Resistivity Mapping System Omnimap RS35e

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    Nicolet Magna 560 FTIR Spectrophotometer

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    Nanometrics Nanospec/AFT Model 200

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    Metricon 2010 Prism Coupler

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    Keithley Silicon and Oxide Monitoring System Quantox 64000

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    Electroglas 690 Prober

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    Dektak 3030 Surface Profiler

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    Dektak 3030ST Surface Profiler

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    WAFER TESTING

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    Verteg Single Rinser/Dryer 1800-50 (Dry Only) 8″

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    Verteq Single Rinser/Dryer 1800-50 (Gen. Etch Bench) 8″

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