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KLA-Tencor Corp. AIT XP Parts/Options
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Brewer Science CEE 4000
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AMAT REFLEXION
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LAM A6 9400PTX 8″
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Mactronix Wafer Transfer System
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TopCon 150 mm LS-750 1C2D
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Tokyo Electron Tohoku Ltd. ALPHA-808SDN (8S) Furnace
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Kokusai Electric Co., Ltd. Quixace Nitride Vertical LPCVD Furnace
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Con Optics M311A
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AMAT VERITY 2
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NITTO DENKO DR8500-II
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Mattson Rapid Thermal Process (RTP)
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Applied Materials Centura DPS+ Metal 200 mm
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Applied Materials Mirra3400-AS2000 200MM Wafer Polisher
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Kokusai Electric Co., Ltd. Quixace II ALD High-k Vertical LPCVD Furnace
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