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Aixtron Crius-R MOCVD
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AIXTRON AIX 2800 G5 HT MOCVD System
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ATC-2200-UHV
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Semitool / Applied Materials Raider TSV ECD Copper Electroplating with RTA
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DNS/ AMAT Sokudo RF-310A
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Tango Axcela 200 PVD tool
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Sez SP203 Etcher
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Centrotherm C. Activator 150-50 Implant Activation & Anneal tool
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CNC FANUC Robodrill α-D21MiA and other tools
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AMAT PI 9500XR 150mm
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Tokyo Electron Alpha 8SE Vertical Furnace, DCS-HTO/TEOS
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OPTORUN OTFC1300 DBI Coating System
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Leybold APS 904 Evaporator
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KLA P16+ Surface profiler
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Buhler Leybold SYRUSpro 1510 E-beam coater
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