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Metrology

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  • Hitachi RS4000 CD-SEM

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  • ADE 9300 Ultrascan

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  • Rudolph Metapulse 300 Film Thickness Measurment System

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  • Hitachi Miniscope TM-1000

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  • KLA Surfscan 7600 Patterned Wafer Inspection 8 Inch

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  • KLA 2608 Defect Review Station 200mm

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  • KLA 2131 Defect Wafer Inspection System 200mm

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  • KLA 2132 wafer defect inspection

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