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Rudolph FE-IV Ellipsometer
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Rudolph FE-VII Ellipsometer
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KLA-Tencor Surfscan 6220 Defect Inspection System
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Nicolet 410 (FT-IR) Spectrometer
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RUDOLPH TECHNOLOGIES INC. – Focus FE III Ellipsometer
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Orbot WF736 (Darkfield Inspection)
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APPLIED MATERIALS SEMVision G2 – Defect Review Station (Module Only)
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KLA-Tencor – KLA2139
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Hitachi S-9200
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APPLIED MATERIALS SEMVISION G2
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APPLIED MATERIALS SEMVISION G4
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OLYMPUS MM6C-CS50-2 (2D Scope)
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Nikon AMI-3500
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KLA-Tencor Surfscan SP1 DLS
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Asyst PST100 Wafer Sorter
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