Lam Research Rainbow 4520i Oxide Etcher/Ascher

Lam Research Rainbow 4520i Oxide Etcher/Ascher 

Wafer Size: 200mm

Lam Envision etcher running Envision 1.5.2 Released software. Main chamber is ESC oxide etch with a ceramic electrostatic chuck. Isotropic chamber configured for isotropic etch, with one heated paddle. Includes orbital weld gas box, with five Unit UFC-1200A, one Unit 1661 Multiflow, two Horiba Z500, and one Horiba Z300 MFCs, plus two Lam Harmonic arm drives. Dry pumps: one Busch DS80 Cobra, one BOC Edwards iQDP80 with Leybold WSU501 blower, and one Busch BA100. Chillers: M&W Dual Ch TCU model RPC2/28W-RNB. Also includes remote AC box and RF cart.

Available November 2026