Lam Research Rainbow 4520i Oxide Etcher/Ascher

Lam Research Rainbow 4520i Oxide Etcher/Ascher 

Wafer Size: 200mm

Lam Envision etcher running Envision 1.5.2 Released software. Main chamber is BAC oxide etch with a domed electrode in anodized aluminum. Isotropic chamber configured for isotropic etch, with one heated paddle. Includes orbital weld gas box, with two Brooks GF100 and six Horiba Z500 MFCs, and two Lam Harmonic arm drives. Dry pumps: one Busch DS80 Cobra, one Busch DS500 Cobra, and one Busch BA100. Chillers: M&W Dual Ch TCU model RPC2/28W-RNB. Also includes remote AC box and RF cart.

Not included with system: loadlock pump, main etch chamber pump, strip/ash chamber pump, roughing pump #3, and chiller. No turbo pump on process chamber(s).

Available November 2026