Santa Clara Plastics / Akrion E200 SACETCH Wet Station

Santa Clara Plastics / Akrion E200 SACETCH Wet Station

Wafer Size: 200mm

Vintage: 2003

Bond room SACETCH wet hood running System 4000 Version X software. Features 5 baths: SAC1 (SACETCH chemistry), SAC2 (ACOH), Hot H₂O₂ + ACOH, Cold H₂O₂, and Greendry — all tanks qualified and operational. CI Semi conductivity monitoring on SAC1 and SAC2. No chuck; batch processing in Teflon cassettes with bulk fill to preweigh dispense. Includes 1 SIERRA 00036590-00, an SCP BTS 6-axis robot, and an SCP LTS 2-axis robot with Teflon end effectors and wash station. Pumps include two White Knight AT100 and two Iwaki centrifugal pumps (6971724A). Tool UPS: Matrix 5000.

Available November 2026