KLA-Tencor / Prometrix UV-1280SE Thin Film Measurement System

KLA-Tencor / Prometrix UV-1280SE Thin Film Measurement System

6-inch wafer thin film metrology system with open cassette loading, SE module, and encapsulated reference chip. Currently on-line and confirmed capable of producing wafers as-is, with no known field modifications and all cables present. Features Brooks H2 robot, 3 µm box/spot size upgrade, horizontal lamp, rear exhaust orientation, 17.5 GB SCSI hard disk, and GEM/SECS interface. Runs Windows NT 3.34.2 with Summit 2.60.22 software, tester firmware V3.10, and handler firmware 4.471APS. CE Mark certified, 120V, off-line 12/4/2025. Standard manuals included; calibration standards, clean room manuals, and CD-ROM manuals not included.

Available November 2026