Key Item Details

Condition:

Good

Operational Service:

Needs Repair

Product ID:

CSISEM131020261220

Wafer Sizes:

200mm

Vintage:

1995

Description

Mattson SHS2800 RTP/RTA System

Process: RTP

Procedure: Anneal

Needs Repair (Robot/Door missing)

Wafer Size: 200mm

Vintage: 1995

Available October 2026