Key Item Details

Condition:

Good

Operational Service:

Good

Product ID:

CSISEMI021020261740

Wafer Sizes:

150mm

Vintage:

2007

Description

It’s a Clusterline 200 II CW with 3 PVD Chambers (Pos3/4/5) and 1 Degass Chamber (Pos1). PM5 is configured with a hot Chuck and a Pyrometer. The transport was upgraded in 2025 with a new Brooks control system, which includes a new aligner.

This upgrade consists of:

  • 1x Magnetically driven dual pan handling robot, BROOKS
  • Magnatran MAG 7.1 with an extension capability of up to 860mm, equipped with BROOKS control system (non-Berkeley), including CDM
  • 2x New load lock elevators
  • Adapter flange for AWC (Active Wafer Centering)

Additionally, a cooler on the transport is included

Available October 2026