Key Item Details

Condition:

Good

Operational Service:

Good

Product ID:

CSISEMI250920262220

Wafer Sizes:

200mm

Vintage:

2011

Description

Axcelis GSD-160E2 High Current Ion Implanter

Wafer Size: 200mm

Vintage: 2011

Flow Hood missing
Box Table missing
Lower Machine Front Panels missing (below the Table)
No Roughpumps included (Edwards Setup)

Available September 2026